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Theory of Ion beam Induced Charge Collection based on the extended Shockley-Ramo Theorem

Presented at 14th International Conference on Ion Beam Analysis (IBA-14) and ECAART-6, Dresden, Germany, July 26-30 1999, and published in Nucl. Instr. And Meth. In Phys. Res. B, 161-163 (1-4) (2000) pp. 446-451

E.Vittone, F.Fizzotti, A.LoGiudice, C.Paolini, C.Manfredotti

aExperimental Physics Dept., Torino University, INFN-Sez. Torino, INFM-Unità di Torino, via P.Giuria 1, 10125 Torino, Italy.

Keywords: Semiconductors, Electronic properties, Ion Beam Induced Charge


An analysis of the charge collection process induced by focused MeV ion beams in semiconductor devices is presented. It is based on the extended Shockley - Ramo theorem that provides a rigorous mathematical tool for the calculation of the induced charge and current under the assumption of a quasi-steady-state operation of the semiconductor device.

A complete description of the theory and underlying assumption is given as well as a simple application of the method aimed to evaluate the main transport properties of fully depleted semiconductors from the analysis of frontal and lateral IBICC measurements.