Cleanroom



The Solid State Physics Laboratory is equipped with a class 10,000 cleanroom acquired with the joint support of the "Open Access Lab" funding scheme of the University of Torino, of the Physics Department and of INFN. The cleanroom is equipped with facilities to condition the environmental conditions (dust particles in air, temperature, humidity) within an enclosed area of of 42 m2.
It is possible to access to the cleanroom through a vestition room, while a pass-box allows transferring directly samples and materials into the cleanroom. At present, the cleanroom laboratory includes the following facilities:
  • a microfabrication setup based on a high-power pulsed laser;
  • a set of thermal processing chambers;
  • a probe station for electrical characterization in temperature;
  • an optical microscope.